Technical
*Measurement functions are still limited to SJ-500 specs.
Measuring Ranges Z-axis: 800um (32000uin), 80um (3200uin), 8um (320uin) X-axis: 50mm (2)
Digital Filter 2CR-75%, 2CR-50%, 2CRPC-75%, 2CRPC-50%, Gaussian, Rubust-spline
Cutoff Length 0.08mm, 0.25mm, 0.8mm, 2.5mm, 8mm (.003, .01, .03, .1, .3)
Sampling Length (L) 0.08mm, 0.25mm, 0.8mm, 2.5mm, 8mm (.003, .01, .03, .1, .3)
Number of sampling Length x1, x3, x5, xL* [*=Arbitrary length]
Minimum Resolution 0.0001um (8um Range) , 0.005uin (320uin Range)
Recording Magnification Vertical: 20X to 100K, Auto
Horizontal: 1x to 1K, Auto
Other Functions
Data Output RS232C
Dimensions PC I/F Unit : 13.7 x 10.4 x 3.4 (350 x 263 x 86mm)
Drive Unit
Measuring Speed 0.00078 ~0.2/s (0.02~5mm/s)
X-axis drive speed 0~.79/s (0 to 20mm/s) and manual
Resolution 0.05um (1.97uin)
Standard Detector 178-397-2 / 178-396-2
Detecting Method Differential Inductance Method
Stylus Tip Radius 5ïm, Diamond / Tip Radius 2um Diamond
Skid Radius of Curvature 40mm (1.57in)
Measuring Force 4mN (0.4 gram force) / .75mN (.075 gram force)
Dimensions Dia. 9 x 72mm (.35 Dia. X 2.8in)
